Electron microscopes
Electron microscopes
May 30, 2008
sciencelearn.org.nz
Hi There ! We are the official account for Hitachi Electron Microscopes 🔬 Follow us for SEM, TEM and FIB insights ! | Hitachi Electron Microscope
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Hi There ! We are the official account for Hitachi Electron Micro…
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Hi there ! We are the official account for Hitachi Electron Microscopes 🔬 Follow us for topics related to Hitachi SEM, TEM and FIB ! | Hitachi Electron Microscope
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Hi there ! We are the official account for Hitachi Electron Microscopes 🔬 …
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A TEM lamella of an SRAM was prepared using a FIB-SEM. The lamella was thinned down to a thickness of 50 nm and various STEM images were observed on the FIB-SEM equipped with a STEM detector. BF-STEM image shows the crystal structure of Poly-Si region and surrounding structures. MADDF-STEM image highlights the barrier metal around the W plug. HAADF-STEM image provides Z-contrast according to the average atomic number. Several nm thick gate oxide layer was clearly observed at higher magnification
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A TEM lamella of an SRAM was prepared using a FIB-SEM. The la…
123 viewsMay 17, 2023
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How Electron Microscopes Take Pictures of Atoms: The Technology Behind It
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How Electron Microscopes Take Pictures of Atoms: The Technolog…
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A TEM lamella of a 176 layered 3D NAND was prepared with uniform thickness throughout whole 11 μm deep channel holes. SiO and Poly Si layers were well observed from top to bottom showing the 100 nm diameter channel holes were thinned down to about 30 nm while keeping their center. The shape of the channel hole joint was also visualized in the middle area. #3DNAND #NAND #ChannelHole #FIB #SEM #FIBSEM #TEM #electronmicroscopy #ElectronMicroscope Available instruments for this measurement are : FIB
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A TEM lamella of a 176 layered 3D NAND was prepared with uniform …
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Real-time STEM on orthogonally-arranged (L-shape) FIB-SEM enabled highly accurate site-specific TEM lamella preparation from 14 nm FinFET. Targeting the gate metal, metal layers (M1) on both sides were completely removed by FIB and low energy Ar ion milling utilizing STEM observation as well as SEM. Available instruments for this measurement are : L-shape FIB-SEM https://www.hitachi-hightech.com/global/science/products/microscopes/focused-ion-beam-systems/nx9000.html Aberration Corrected STEM ht
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Real-time STEM on orthogonally-arranged (L-shape) FIB-SEM enabl…
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Electron Microscope
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