ASML VS ASM International: what's the difference?
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ASML Developing Next-Gen EUV Lithography
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ASML VS ASM International: what's the difference?
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ASML engineers and technicians work in a high-tech environment where cleanroom processes, module builds, and hands-on training come together to produce the world’s most advanced lithography systems used in semiconductor production. | ASML
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【☄️ASML第一代多光束檢測設備順利出貨抵達客戶端🎉】​ ​ 隨著半導體製程技術不斷微縮，製程中的缺陷忍受度也越來越小，而為了能更符合客戶端的產能需求，ASML針對5奈米以上先進製程節點研發第一代HMI多光束檢測設備（Multibeam Inspection System），並在5月底完成設備的整合測試。型號HMI eScan 1000透過9條電子束檢測掃描，可檢測較多數量的晶圓，作業速度比原先的電子束檢測設備提高多達600%！​ ​ #HowDoWeChallenge​ 多光束檢測設備包括電子光學系統，能夠發射及控制多個檢測電子束，然後收集並處理反射後的電子束，並將光束間的互相干擾限制在2%以下，提供一致的成像品質。它還有高速平台以增加整體檢測速度，以及高速運算系統能夠即時處理多個光束檢測後的數據。​ ​ 透過以上的功能設計，HMI eScan 1000適用於物理缺陷和電壓對比檢測，讓客戶不管在研發規劃製程階段或量產監測階段，都能針對大範圍的缺陷做檢測。​ ​ 目前第一台多光束檢測設備HMI eScan 1000已順利抵達客戶端，我們也計畫在未來增加檢測系統中的光束數量以及光束解
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